陀螺儀和感應器模組產品 | 化學工廠資訊網
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Kionix是一間高品質微機電(MEMS)系統的MEMS製造商,製造項目包括加速度感測器、陀螺儀和感測器模組慣性感測器技術。
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Kionix™ Technology is defined by the proprietary plasma micromachining process and the technology to hermetically seal at a wafer level by bonding the silicon lid wafer to the device wafer. The sense element that detects acceleration consists of a fixed electrode, a movable electrode, and a spring. These structures are formed on the silicon device wafer using ROHM’s proprietary plasma micromachining process which allows deep and high precision etching. Using advanced technology, the lid wafer is hermetically sealed to the device wafer with these formed structures resulting in the completion of the sense element. ROHM electrostatic capacitive MEMS are manufactured using Kionix™ Technology and delivers outstanding performance.
About KionixKionix, Inc., originally founded in 1993 as a global MEMS accelerom...
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